O mea faigaluega taua mo metotia su'esu'e e aofia ai: masini fa'apitoa (OM), masini fa'aeletonika e su'esu'e fa'alua-beam (DB-FIB), fa'ata'ita'i fa'aeletonika (SEM), ma masini fa'aeletonika fa'asalalau (TEM).O le tusiga o aso nei o le a faʻaalia ai le faʻavae ma le faʻaogaina o le DB-FIB, e taulaʻi i le gafatia o le tautua a le leitio ma le televise metrology DB-FIB ma le faʻaogaina o le DB-FIB i suʻesuʻega semiconductor.
O le a le DB-FIB
E lua-beam scanning electron microscope (DB-FIB) o se meafaigaluega e tuʻufaʻatasia le faʻaogaina o le ion beam ma le suʻeina o le eletise eletise i luga o le tasi microscope, ma faʻapipiʻiina i mea faʻaoga e pei o le kesi tui (GIS) ma le nanomanipulator, ina ia ausia ai le tele o galuega. e pei o le togitogiga, teuina o meafaitino, micro ma nano processing.
Faatasi ai ma i latou, o le taulaiga ion beam (FIB) faʻavavevaveina le ion beam gaosia e le vai gallium metal (Ga) puna ion, ona taulaʻi atu lea i luga o le faʻataʻitaʻiga e faʻatupu ai faʻailoga eletise lona lua, ma aoina e le mea e iloa ai.Po'o le fa'aogaina o le ion beam malosi o lo'o iai nei e fa'asolo ai le fa'ata'ita'iga i luga o le fa'ata'ita'iga mo micro ma nano process;E mafai fo'i ona fa'aoga le tu'ufa'atasiga o le fa'aoso fa'aletino ma le kesi kemisi e togi ai pe teu ai u'amea ma insulators.
Galuega autu ma fa'aoga a le DB-FIB
Galuega autu: fa'apipi'i fa'asagaga fa'asaga, tapenaga fa'ata'ita'iga TEM, togitogi filifilia po'o le fa'aleleia atili, fa'aputuina o mea u'amea ma le fa'amama fa'amama.
Fa'aoga fanua: DB-FIB o loʻo faʻaaogaina lautele i mea sima, polymers, mea uʻamea, biology, semiconductor, geology ma isi vaega o suʻesuʻega ma suʻega oloa faʻatatau.Aemaise lava, o le tulaga tulaga ese o le DB-FIB o le tu'uina atu o fa'ata'ita'iga fa'ata'ita'iga agava'a e le mafai ai ona suitulaga i le gafatia o le su'esu'eina o le semiconductor.
GRGTEST DB-FIB auaunaga gafatia
O le DB-FIB o loʻo faʻapipiʻiina nei e le Shanghai IC Test and Analysis Laboratory o le Helios G5 series o Thermo Field, o le Ga-FIB sili ona maualuga i le maketi.O le faasologa e mafai ona ausia le suʻesuʻeina o faʻataʻitaʻiga faʻataʻitaʻiga eletise eletise i lalo ole 1 nm, ma e sili atu le faʻaogaina i tulaga o le faʻaogaina o le ion beam ma le masini nai lo le augatupulaga muamua o le lua-beam electron microscopy.O le DB-FIB o loʻo faʻapipiʻiina i nanomanipulators, faʻaogaina o kesi (GIS) ma le malosi o alaleo EDX e faʻafetaui ai le tele o manaʻoga faʻapitoa ma le alualu i luma semiconductor suʻesuʻega.
I le avea ai o se meafaigaluega mamana mo le suʻesuʻeina o mea totino faʻaletino semiconductor, e mafai e le DB-FIB ona faʻatinoina le faʻaogaina o vaega faʻasolosolo faʻatasi ma le nanometer saʻo.I le taimi lava e tasi o le FIB, o le suʻesuʻeina o le eletise eletise ma le nanometer resolution e mafai ona faʻaogaina e mataʻituina ai le microscopic morphology o le koluse-vaega ma iloilo le tuufaatasiga i le taimi moni.Ausia le faʻaputuina o mea uʻamea eseese (tungsten, platinum, ma isi) ma mea e le faʻaaogaina (carbon, SiO2);E mafai foʻi ona saunia fasi fasi mea e sili atu ona manifinifi TEM i se tulaga tumau, e mafai ona fetaui ma manaʻoga o le mataʻituina o le maualuga maualuga i le tulaga atomika.
O le a fa'aauau pea ona teu fa'afaigaluega i masini fa'akomepiuta fa'aeletoroni fa'aeletoroni, fa'aauau pea ona fa'aleleia ma fa'alautele le fa'avasegaina o le fa'aletonu o le semiconductor, ma tu'uina atu i tagata fa'atau fa'amatalaga au'ili'iliga fa'aletonu.
Taimi meli: Apr-14-2024